@ARTICLE{Kucharski_D._A_2020, author={Kucharski, D. and Zdunek, H.}, volume={68}, number={48}, journal={Bulletin of the Polish Academy of Sciences Technical Sciences}, pages={485-490}, howpublished={online}, year={2020}, abstract={We present a prototype of a simple, low-cost setup for a fast scatterometric surface texture measurements. We used a total integrated scatter method (TIS) with a semiconductor laser (λ =  638 nm) and a Si photodiode. Using our setup, we estimated the roughness parameters Rq for two reference surfaces (Al mirrors with flatness λ/10) and seven equal steel plates to compare. The setup is easily adaptable for a fast, preliminary manufacturing quality control. We show is possible to construct a low-cost measurement system with nanometric precision.}, type={Article}, title={A low-cost, simple optical setup for a fast scatterometry surface roughness measurements with nanometric precision}, URL={http://czasopisma.pan.pl/Content/116520/PDF/10_485-490_01475_Bpast.No.68-3_30.06.20_K3A_TeX.pdf}, doi={10.24425/bpasts.2020.133364}, keywords={scatterometry, surface texture, optical measurement systems, surface metrology, surface roughness}, }