TY - JOUR N2 - An active beam-pointing stabilization system has been developed for a high-power KrF laser system to eliminate the long-term drift of the directional change of the beam in order to have a stable focusing to a high intensity. The control of the beam direction was achieved by a motor-driven mirror activated by an electric signal obtained by monitoring the position of the focus of the output beam. Instead of large sized UV-sensitive position sensitive detectors a simple arrangement with scatter plates and photodiodes are used to measure the directionality of the beam. After the beam stabilization the long-term residual deviation of the laser shots is ~14 μrad, which is comparable to the shot-to-shot variation of the beam (~12 μrad). This deviation is small enough to keep the focal spot size in a micrometer range when tightly focusing the beam using off-axis parabolic mirrors. L1 - http://czasopisma.pan.pl/Content/90313/PDF/Journal10178-VolumeXXII%20Issue1_15.pdf L2 - http://czasopisma.pan.pl/Content/90313 PY - 2015 IS - No 1 EP - 172 DO - 10.1515/mms-2015-0014 KW - diffraction-limited UV pulse KW - beam-pointing stabilization KW - long-term drift KW - photodiode A1 - Barna, A. A1 - Földes, I. B. A1 - Bohus, J. A1 - Szatmári, S. PB - Polish Academy of Sciences Committee on Metrology and Scientific Instrumentation VL - vol. 22 DA - 2015[2015.01.01 AD - 2015.12.31 AD] T1 - Active Stabilization of the Beam Pointing of a High- Power KrF Laser System SP - 165 UR - http://czasopisma.pan.pl/dlibra/publication/edition/90313 T2 - Metrology and Measurement Systems ER -