Abstract
In this work the design aspects of a piezoelectric-based resonance ceramic
pressure sensor made using low-temperature co-fired ceramic (LTCC)
technology and designed for high-temperature applications is presented.
The basic pressure-sensor structure consists of a circular, edge-clamped,
deformable diaphragm that is bonded to a ring, which is part of the rigid
ceramic structure. The resonance pressure sensor has an additional element
– a piezoelectric actuator – for stimulating oscillation of the diaphragm
in the resonance-frequency mode. The natural resonance frequency is
dependent on the diaphragm construction (i.e., its materials and geometry)
and on the actuator. This resonance frequency then changes due to the
static deflection of the diaphragm caused by the applied pressure. The
frequency shift is used as the output signal of the piezoelectric
resonance pressure sensor and makes it possible to measure the static
pressure. The characteristics of the pressure sensor also depend on the
temperature, i.e., the temperature affects both the ceramic structure (its
material and geometry) and the properties of the actuator. This work is
focused on the ceramic structure, while the actuator will be investigated
later.
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