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Abstract

The article presents an overview and a classification of X-ray detection methods. The main motivation for its preparation was the need to select a suitable and useful method for detecting signals from a currently developed miniature micro-electro-mechanical system (MEMS) X-ray source. The described methods were divided into passive and active ones, among which can be distinguished: chemical, luminescent, thermo-luminescent, gas ionization, semiconductor, and calorimetric methods. The advantages and drawbacks of each method were underlined, as well as their usefulness for the characterisation of the miniature MEMS X-ray source.
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Authors and Affiliations

Paweł Urbański 
1
ORCID: ORCID
Tomasz Grzebyk
1
ORCID: ORCID

  1. Faculty of Electronics, Photonics and Microsystems, Wrocław University of Science and Technology, ul. Janiszewskiego 11/17, 50-372 Wrocław, Poland

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