High-speed serial standards are rapidly developing, and with a requirement for effective compliance and characterization measurement methods. Jitter decomposition consists in troubleshooting steps based on jitter components from decomposition results. In order to verify algorithms with different deterministic jitter (DJ) in actual circuits, jitter generation model by cross-point calibration and timing modulation for jitter decomposition is presented in this paper. The generated jitter is pre-processed by cross-point calibration which improves the accuracy of jitter generation. Precisely controllable DJ and random jitter (RJ) are generated by timing modulation such as data-dependent jitter (DDJ), duty cycle distortion (DCD), bounded uncorrelated jitter (BUJ), and period jitter (PJ). The benefit of the cross-point calibration was verified by comparing generation of controllable jitter with and without cross-point calibration. The accuracy and advantage of the proposed method were demonstrated by comparing with the method of jitter generation by analog modulation. Then, the validity of the proposed method was demonstrated by hardware experiments where the jitter frequency had an accuracy of 20 ppm, the jitter amplitude ranged from 10 ps to 8.33 ns, a step of 2 ps or 10 ps, and jitter amplitude was independent of jitter frequency and data rate.