Details Details PDF BIBTEX RIS Title Amorphous Dielectric Thin Films with Extremely Low Mechanical Loss Journal title Archives of Metallurgy and Materials Yearbook 2015 Issue No 1 March Authors Liu, X. ; Queen, D.R. ; Metcalf, T.H. ; Karel, J.E. ; Hellman, F. Divisions of PAS Nauki Techniczne Publisher Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences Date 2015[2015.01.01 AD - 2015.12.31 AD] Identifier DOI: 10.1515/amm-2015-0059 ; e-ISSN 2300-1909 Source Archives of Metallurgy and Materials; 2015; No 1 March References Cohen (1980), Origin of low - temperature tunneling states in glasses, Phys Rev Lett, 1271, doi.org/10.1103/PhysRevLett.45.1271 ; Phillips (1972), Tunneling states in amorphous solids Low, Temp Phys, 351, doi.org/10.1007/BF00660072 ; Tielbürger (1992), Thermally activated relaxation processes in vitreous silica : An investigation by Brillouin scattering at high pressures, Phys Rev B, 45. ; Martinis (2005), Decoherence in josephson qubits from dielectric loss, Phys Rev Lett, 210503, doi.org/10.1103/PhysRevLett.95.210503 ; Bellessa (1978), Frequency and temperature dependence of the sound velocity in amorphous materials at low temperatures, Phys Rev Lett, 1456, doi.org/10.1103/PhysRevLett.40.1456 ; Angell (2000), Ten questions on glassformers and a real space excitations model with some answers on fragility and phase transitions, Phys Condens Matter, 12, 6463, doi.org/10.1088/0953-8984/12/29/318 ; Liu (1998), Contamination of silicon during ion - implantation and annealing, Cryst Solids, 227. ; Spiel (2001), Normal modes of a Si double - paddle oscillator, Rev Sci Instrum, 1482, doi.org/10.1063/1.1340559 ; Liu (1997), Amor - phous solid without low energy excitations Low - energy excitations in amorphous films of silicon and germanium Excess specific heat in evaporated amorphous silicon Resolved - sideband and cryogenic cooling of an optomechanical resonator, Phys Rev Lett Phys Rev B Phys Rev Lett Nat Phys, 4418, doi.org/10.1103/PhysRevLett.78.4418 ; Hellman (1994), Surface - induced ordering : A model for vapor - deposition growth of amorphous materials, Appl Phys Lett, 1947, doi.org/10.1063/1.111751 ; Pohl (2002), Low - temperature thermal con - ductivity and acoustic attenuation in amorphous solids, Rev Mod Phys, 991, doi.org/10.1103/RevModPhys.74.991 ; Anderson (1972), Anomalous low - temperature thermal properties of glasses and spin glasses, Philos Mag, 25, 1, doi.org/10.1080/14786437208229210 ; Magalas (2006), Determination of the logarithmic decrement in mechanical spectroscopy Solid State, Phenomena, 115. ; Houston (2002), Thermoelastic loss in microscale oscillators, Appl Phys Lett, 1300, doi.org/10.1063/1.1449534 ; Zeller (1971), Thermal conductivity and specific heat of noncrystalline solids, Phys Rev B, 4, 2029, doi.org/10.1103/PhysRevB.4.2029 ; White (1997), Elastic properties of amorphous solids below, Phys, 401. ; Hopcroft (2010), What is the Young s modulus of silicon, Microelectromech Sci, 19, 229, doi.org/10.1109/JMEMS.2009.2039697 ; Treacy (2012), The local structure of amor - phous silicon, Science, 335.