Title

Characterization of the ionization process inside a miniature glow-discharge micropump

Journal title

Bulletin of the Polish Academy of Sciences Technical Sciences

Yearbook

2018

Volume

66

Issue

No 2 (Special Section on Nano- and Micromechanics)

Authors

Grzebyk, T. ; Górecka-Drzazga, A.

Keywords

ion-sorption micropump ; MEMS-type micropump ; gas discharge ; ionization

Divisions of PAS

Nauki Techniczne

Coverage

173-178

Date

2018.04.30

Identifier

DOI: 10.24425/122097 ; ISSN 2300-1917

Source

Bulletin of the Polish Academy of Sciences: Technical Sciences; 2018; 66; No 2 (Special Section on Nano- and Micromechanics); 173-178