Title

Scanning probe microscopy as a metrology method in microand nanostructure investigations

Journal title

Bulletin of the Polish Academy of Sciences Technical Sciences

Yearbook

2006

Volume

vol. 54

Issue

No 1

Authors

Gotszalk, T. ; Marendziak, A. ; Kolanek, K. ; Szeloch, R. ; Grabiec, P. ; Zaborowski, M. ; Janus, P. ; Rangelow, I.W.

Keywords

scanning probe microscopy ; micro- and nanostructure investigations

Divisions of PAS

Nauki Techniczne

Coverage

19-23

Date

2006

Type

Artykuły / Articles

Identifier

ISSN 2300-1917

Source

Bulletin of the Polish Academy of Sciences: Technical Sciences; 2006; vol. 54; No 1; 19-23