Title

Fabrication of CdMgTe/Cd(Mn)Te nanostructures with the application of high-resolution electron-beam lithography

Journal title

Opto-Electronics Review

Yearbook

2017

Volume

vol. 25

Issue

No 2

Authors

Wróbel, Joanna ; Bobko, E. ; Płoch, Dariusz ; Wiater, M. ; Wojtowicz, T.

Keywords

Nanopatterning ; Electron beam lithography ; Wet etching ; Side gate

Divisions of PAS

Nauki Techniczne

Coverage

65-68

Publisher

Polish Academy of Sciences (under the auspices of the Committee on Electronics and Telecommunication) and Association of Polish Electrical Engineers in cooperation with Military University of Technology

Date

19.04.2017

Type

Article

Identifier

ISSN 1896-3757

Source

Opto-Electronics Review; 2017; vol. 25; No 2; 65-68