Title

A low-cost, simple optical setup for a fast scatterometry surface roughness measurements with nanometric precision

Journal title

Bulletin of the Polish Academy of Sciences Technical Sciences

Yearbook

2020

Volume

68

Issue

48

Authors

Kucharski, D. ; Zdunek, H.

Keywords

scatterometry ; surface texture ; optical measurement systems ; surface metrology ; surface roughness

Divisions of PAS

Nauki Techniczne

Coverage

485-490

Date

30.06.2020

Type

Article

Identifier

DOI: 10.24425/bpasts.2020.133364

Source

Bulletin of the Polish Academy of Sciences: Technical Sciences; 2020; 68; 48; 485-490