Title

Growth Temperature Effect of Atomic-Layer-Deposited GdOx Films

Journal title

Archives of Metallurgy and Materials

Yearbook

2021

Volume

vol. 66

Issue

No 3

Authors

Ryu, Sung Yeon ; Yun, Hee Ju ; Lee, Min Hwan ; Choi, Byung Joon

Affiliation

Ryu, Sung Yeon : Seoul National University of Science and Technology, Department of Material Science and Engineering, Seoul 01811, Korea ; Yun, Hee Ju : Seoul National University of Science and Technology, Department of Material Science and Engineering, Seoul 01811, Korea ; Lee, Min Hwan : University of California Merced, Department of Mechanical Engineering, Merced, California, USA ; Choi, Byung Joon : Seoul National University of Science and Technology, Department of Material Science and Engineering, Seoul 01811, Korea

Keywords

gadolinium oxide (Gd2O3) ; rare-earth oxide ; atomic layer deposition ; hydrophobicity ; electrical property

Divisions of PAS

Nauki Techniczne

Coverage

755-758

Publisher

Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences

Bibliography

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Date

2021.09.06

Type

Article

Identifier

DOI: 10.24425/amm.2021.136375

Source

Archives of Metallurgy and Materials