Title

Development and verification of a high-precision laser measurement system for straightness and parallelism measurement

Journal title

Metrology and Measurement Systems

Yearbook

2021

Volume

vol. 28

Issue

No 3

Authors

Xu, Peng ; Li, Rui Jun ; Zhao, Wen Kai ; Chang, Zhen Xin ; Ma, Shao Hua ; Fan, Kuang Chao

Affiliation

Xu, Peng : Hefei University of Technology, School of Instrument Science and Opto-Electronics Engineering, Hefei, China ; Li, Rui Jun : Hefei University of Technology, School of Instrument Science and Opto-Electronics Engineering, Hefei, China ; Zhao, Wen Kai : Hefei University of Technology, School of Instrument Science and Opto-Electronics Engineering, Hefei, China ; Chang, Zhen Xin : Hefei University of Technology, School of Instrument Science and Opto-Electronics Engineering, Hefei, China ; Ma, Shao Hua : Hefei University of Technology, School of Instrument Science and Opto-Electronics Engineering, Hefei, China ; Fan, Kuang Chao : Hefei University of Technology, School of Instrument Science and Opto-Electronics Engineering, Hefei, China

Keywords

straightness ; parallelism ; laser measurement system ; machine tool

Divisions of PAS

Nauki Techniczne

Coverage

479-495

Publisher

Polish Academy of Sciences Committee on Metrology and Scientific Instrumentation

Bibliography

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[2] Chen, Z., & Liu, X. (2020). A Self-adaptive interpolation method for sinusoidal sensors. IEEE Transactions on Instrumentation and Measurement, 69(10), 7675–7682. https://doi.org/10.1109/ TIM.2020.2983094
[3] Acosta, D., & Albajez, J. A. (2018). Verification of machine tools using multilateration and a geometrical approach. Nanomanufacturing and Metrology, 1(1), 39–44. https://doi.org/10.1007/ s41871-018-0006-y
[4] Chen, B. Y., Zhang, E. Z., & Yan, L. P. (2009). A laser interferometer for measuring straightness and its position based on heterodyne interferometry. Review of Scientific Instruments, 80(11), 115113. https://doi.org/10.1063/1.3266966
[5] Zhu, L. J., Li, L., Liu, & J. H. (2009). A method for measuring the guideway straightness error based on polarized interference principle. International Journal of Machine Tools and Manufacture, 49(3–4), 285–290. https://doi.org/10.1016/j.ijmachtools.2008.10.009
[6] Lin, S. T. (2001). A laser interferometer for measuring straightness. Optics & Laser Technology, 33(3), 195–199. https://doi.org/10.1016/S0030-3992(01)00024-X
[7] Jywe, W. Y., Liu, C. H., Shien, W. H., Shyu, L. H., & Fang, T. H. (2006). Development of a multidegree of freedoms measuring system and an error compensation technique for machine tools. Journal of Physics Conference Series, 48(1), 761–765. https://doi.org/10.1088/1742-6596/48/1/144
[8] Feng, Q. B., Zhang, B. & Cui, C. X. (2013). Development of a simple system for simultaneous measuring 6DOF geometric motion errors of a linear guide. Optics Express, 21(22), 25805–25819. https://doi.org/10.1364/OE.21.025805
[9] Liu, C. H., Chen, J. H., & Teng, Y. F. (2009). Development of a straightness measurement and compensation system with multiple right-angle reflectors and a lead zirconate titanate-based compensation stage. Review of Scientific Instruments, 80(11), 115105. https://doi.org/10.1063/1.3254018
[10] Fan, K. C. (2000). A laser straightness measurement system using optical fiber and modulation techniques. International Journal of Machine Tools Manufacture, 40(14), 2073–2081. https://doi.org/ 10.1016/S0890-6955(00)00040-7
[11] Hsieh, T. H., Chen, P. Y., & Jywe, W. Y. (2019). A geometric error measurement system for linear guideway assembly and calibration. Applied Sciences, 9(3), 574. https://doi.org/10.3390/app9030574
[12] Ni, J., & Huang, P. S. (1992). A multi-degree-of-freedom measuring system for CMM geometric errors. Journal of Manufacturing Science and Engineering, 114(3), 362–369. https://doi.org/10.1115/1.2899804
[13] Rahneberg, I., & Büchner, H. J. (2009). Optical system for the simultaneous measurement of twodimensional straightness errors and the roll angle. Proceedings of the International Society for Optics and Photonics, the Czech Republic, 7356. https://doi.org/10.1117/12.820634
[14] Chou, C., Chou, L. Y. & Peng, C. K. (1997). CCD-based CMM geometrical error measurement using Fourier phase shift algorithm. International Journal of Machine Tools and Manufacture, 37(5): 579–590. https://doi.org/10.1016/S0890-6955(96)00078-8
[15] Sun, C., Cai, S., & Liu, Y. (2020). Compact laser collimation system for simultaneous measurement of five-degree-of-freedom motion errors. Applied Sciences, 10(15), 5057. https://doi.org/10.3390/app10155057
[16] Huang, Y., Fan, Y., Lou, Z., Fan, K. C., & Sun, W. (2020). An innovative dual-axis precision level based on light transmission and refraction for angle measurement. Applied Sciences, 10(17), 6019. https://doi.org/10.3390/app10176019
[17] Born M., & Wolf E. (2013). Principles of Optics: Electromagnetic Theory of Propagation, Interference and Diffraction of Light. Elsevier. https://www.sciencedirect.com/book/9780080264820/ principles-of-optic

Date

2021.09.06

Type

Article

Identifier

DOI: 10.24425/mms.2021.137132