Title

TiAl-based Ohmic Contacts to p-type 4H-SiC

Journal title

International Journal of Electronics and Telecommunications

Yearbook

2021

Volume

vol. 67

Issue

No 3

Authors

Martychowiec, Agnieszka ; Kwietniewski, Norbert ; Kondracka, Kinga ; Werbowy, Aleksander ; Sochacki, Mariusz

Affiliation

Martychowiec, Agnieszka : Warsaw University of Technology, Institute of Microelectronics and Optoelectronics, Koszykowa 75, 00-662 Warsaw, Poland ; Kwietniewski, Norbert : Warsaw University of Technology, Institute of Microelectronics and Optoelectronics, Koszykowa 75, 00-662 Warsaw, Poland ; Kondracka, Kinga : Warsaw University of Technology, Institute of Microelectronics and Optoelectronics, Koszykowa 75, 00-662 Warsaw, Poland ; Werbowy, Aleksander : Warsaw University of Technology, Institute of Microelectronics and Optoelectronics, Koszykowa 75, 00-662 Warsaw, Poland ; Sochacki, Mariusz : Warsaw University of Technology, Institute of Microelectronics and Optoelectronics, Koszykowa 75, 00-662 Warsaw, Poland

Keywords

ohmic contact ; SiC ; silicon carbide ; TiAl

Divisions of PAS

Nauki Techniczne

Coverage

459-463

Publisher

Polish Academy of Sciences Committee of Electronics and Telecommunications

Bibliography

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Date

2021.09.23

Type

Article

Identifier

DOI: 10.24425/ijet.2021.137834