Szczegóły Szczegóły PDF BIBTEX RIS Tytuł artykułu Structural, Electrical, and Optical Properties of ZnO Films Grown by Atomic Layer Deposition at Low Temperature Tytuł czasopisma Archives of Metallurgy and Materials Rocznik 2022 Wolumin vol. 67 Numer No 4 Autorzy Park, Ji Young ; Weon, Ye Bin ; Jung, Myeong Jun ; Choi, Byung Joon Afiliacje Park, Ji Young : Seoul National University of Science and Technology, Department of Material Science and Engineering, Seoul, Korea ; Weon, Ye Bin : Seoul National University of Science and Technology, Department of Material Science and Engineering, Seoul, Korea ; Jung, Myeong Jun : Seoul National University of Science and Technology, Department of Material Science and Engineering, Seoul, Korea ; Choi, Byung Joon : Seoul National University of Science and Technology, Department of Material Science and Engineering, Seoul, Korea Słowa kluczowe Zinc Oxide (ZnO) ; Atomic layer deposition ; Low temperature growth ; Optoelectronic properties Wydział PAN Nauki Techniczne Zakres 1503-1506 Wydawca Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences Data 2022.11.23 Typ Article Identyfikator DOI: 10.24425/amm.2022.141082 ; e-ISSN 2300-1909 <div class="test"></div>