Title

Dynamic tilt testing of MEMS inclinometers based on conical motions

Journal title

Metrology and Measurement Systems

Yearbook

2023

Volume

vol. 30

Issue

No 1

Authors

Yang, Qihang ; Cai, Chenguang ; Yang, Ming ; Kong, Ming ; Liu, Zhihua ; Liang, Feng

Affiliation

Yang, Qihang : College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou 310018, China ; Cai, Chenguang : National Institute of Metrology of China, Beijing 100013, China ; Yang, Ming : College of Electrical Engineering, Guizhou University, Guiyang 550025, China ; Kong, Ming : College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou 310018, China ; Liu, Zhihua : National Institute of Metrology of China, Beijing 100013, China ; Liang, Feng : Shenyang Aircraft Corporation, Shenyang 110031, China

Keywords

MEMS inclinometer ; sensitivity ; dynamic testing ; conical motion ; angle drift

Divisions of PAS

Nauki Techniczne

Coverage

31-47

Publisher

Polish Academy of Sciences Committee on Metrology and Scientific Instrumentation

Date

2023.05.29

Type

Article

Identifier

DOI: 10.24425/mms.2023.144398