Title

Indium-gallium-zinc oxide thin-film preparation via single-step radio frequency sputter deposition using mixed-oxide powder targets

Journal title

Archives of Electrical Engineering

Yearbook

2023

Volume

vol. 72

Issue

No 2

Authors

Satake, Takahiko ; Kawasaki, Hiroharu ; Aoqiu, Shin-Ichi

Affiliation

Satake, Takahiko : Graduate School of Engineering Sojo University, Ikeda Nishi-ku Kumamoto City, Japan ; Kawasaki, Hiroharu : Department of Electrical and Electronic Engineering, National Institute of Technology, Sasebo College, Okishin-machi, Sasebo City, Nagasaki Pref., Japan ; Aoqiu, Shin-Ichi : Graduate School of Engineering Sojo University, Ikeda Nishi-ku Kumamoto City, Japan

Keywords

In–Ga–Zn–O thin-film ; plasma processes ; powder target ; sputtering deposition ; transparent conductive film

Divisions of PAS

Nauki Techniczne

Coverage

555-563

Publisher

Polish Academy of Sciences

Date

2023.06.19

Type

Article

Identifier

DOI: 10.24425/aee.2023.145425