Details Details PDF BIBTEX RIS Title Research on Uniform Gas Distribution in Cathode System of PVD Coating Equipment for Cutting Tools Journal title Archives of Metallurgy and Materials Yearbook 2025 Volume vol. 70 Issue No 4 Authors Jiang, Zhao ; Ma, Zhanji ; Luo, Shuilian ; Zhang, Yanshuai Affiliation Jiang, Zhao : National Key Laboratory on Vacuum Technology and Physics, Lanzhou Institute of Physics, Lanzhou 730000, P.R. China ; Ma, Zhanji : National Key Laboratory on Vacuum Technology and Physics, Lanzhou Institute of Physics, Lanzhou 730000, P.R. China ; Luo, Shuilian : National Key Laboratory on Vacuum Technology and Physics, Lanzhou Institute of Physics, Lanzhou 730000, P.R. China ; Zhang, Yanshuai : National Key Laboratory on Vacuum Technology and Physics, Lanzhou Institute of Physics, Lanzhou 730000, P.R. China Keywords PVD coating ; Cathode system ; Uniform gas distribution ; Finite element simulation ; Coating appearance uniformity Divisions of PAS Nauki Techniczne Coverage 1499-1505 Publisher Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences Date 22.12.2025 Type Article Identifier DOI: 10.24425/amm.2025.156230